乙硼烷混氦气

乙硼烷/混合气 B2H6/He Mixture

Components (组分)

Content(含量)

B2H6, 5N

≥0.1%

He,6N

Balance (平衡气)

组分 Components

规格Specification

乙硼烷 Diborane(B2H6)5N

99.999%

Nitrogen (N2)

≤2 ppmv

Oxygen (O2)

≤0.5 ppmv

二氧化碳 Carbon Dioxide (CO2)

≤2 ppmv

甲烷 Methane (CH4)

≤4 ppmv

Hydrogen (H2)

≤100 ppmv

三氟化硼 Boron Trifluoride(BF3)

50 ppmv

Teraborane(B4H10)

180 ppmv

Pentaborane(B5H9)

10 ppmv

Pentaborane(B5H11)

10 ppmv

Hexaborane(B6H10)

10 ppmv

氦气 Helium(He)6N 

99.9999%

Water(H20)

≤0.5ppmv

Oxygen (O2)

≤0.5 ppmv

Nitrogen (N2)

≤0.5 ppmvv

甲烷 Methane (CH4)

≤0.1 ppmv

一氧化碳Carbon Monoxide (CO)

≤0.1 ppmv

二氧化碳Carbon Dioxide (CO2)

≤0.1 ppmv

包装规格

气瓶大小 Cylinder Size

47L

充装量 Fill Weight (kgs)

100Bar

阀门 Valve Connection

CGA350/DISS632

尺寸 Cylinder Dimensions(cm)

23x140